Rapid Synthesis of Piezoelectric ZnO-Nanostructures for Micro Power-Generators
来源期刊：JOURNAL OF MATERIALS SCIENCE TECHNOLOG2013年第10期
论文作者：Tien-Kan Chung Ming Chang Hong-Jun Chen
文章页码：893 - 897
摘 要：In this paper,we report a rapid synthesis of piezoelectric ZnO-nanostructures and fabrication of the nanostructuresbased power-generators demonstrating an energy conversion from an environmental mechanical/ultrasonic energy to an electrical energy.The ZnO nanostructures are grown on a silicon wafer by a modified chemical solution method（CSD,chemical-solution-deposition） with a two-step thermal-oxidation approach.The synthesis process can be completed within 1 h.By varying the mixture-ratio of Zn micro-particles in an oxalic acid solution with0.75 mol/l concentration in the℃SD process,the growth mechanism is well-controlled to synthesize three different types of ZnO-nanostructures（i.e.,dandelion-like nanostructures,columnar nanostructures,and nanowires）.Furthermore,through oxidizing at different temperatures in the thermal-oxidation process,the featured geometry of the nanostructures（e.g.,the length and diameter of a nanowire） is modified.The geometry,size,morphology,crystallization,and material phase of the modified nanostructures are characterized by scanning electron microscopy and X-ray diffraction.Finally,the nanostructures are used to fabricate several micro power-generators.Through the piezoelectric effect,a maximum current density output of 0.28 mA cm2generated by a power-generator under an ultrasonic wave is observed.
Tien-Kan Chung2，Ming Chang3,4，Hong-Jun Chen3
2. Department of Mechanical Engineering,National Chiao Tung University3. Department of Mechanical Engineering,Chung Yuan Christian University4. State Key Laboratory of Digital Manufacturing Equipment and Technology,Huazhong University of Science and Technology
摘 要：In this paper,we report a rapid synthesis of piezoelectric ZnO-nanostructures and fabrication of the nanostructuresbased power-generators demonstrating an energy conversion from an environmental mechanical/ultrasonic energy to an electrical energy.The ZnO nanostructures are grown on a silicon wafer by a modified chemical solution method（CSD,chemical-solution-deposition） with a two-step thermal-oxidation approach.The synthesis process can be completed within 1 h.By varying the mixture-ratio of Zn micro-particles in an oxalic acid solution with0.75 mol/l concentration in the℃SD process,the growth mechanism is well-controlled to synthesize three different types of ZnO-nanostructures（i.e.,dandelion-like nanostructures,columnar nanostructures,and nanowires）.Furthermore,through oxidizing at different temperatures in the thermal-oxidation process,the featured geometry of the nanostructures（e.g.,the length and diameter of a nanowire） is modified.The geometry,size,morphology,crystallization,and material phase of the modified nanostructures are characterized by scanning electron microscopy and X-ray diffraction.Finally,the nanostructures are used to fabricate several micro power-generators.Through the piezoelectric effect,a maximum current density output of 0.28 mA cm2generated by a power-generator under an ultrasonic wave is observed.
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