Effect of Co-Deposited Iron on Microstructures and Properties of Electroplated Nanocrystalline Nickel-Iron Alloys
来源期刊：JOURNAL OF RARE EARTHS2006年增刊第1期
论文作者：Myung Hwan Byun Beom Suck Han Yo Seung Song Young Keun Kim
Key words：MEMS; electroplating; nanocrystalline nickel-iron alloy; grain size; internal stress; hardness; roughness;
Abstract: Nickel-iron nanocrystalline alloys with different compositions and grain sizes were fabricated by electroplating for MEMS devices. The iron content of the deposits was changed by varying the nickel/iron ion ratio in the electrolyte. X-ray diffraction (XRD) analysis was applied for measuring the strength of the texture and grain size of the deposits. The nickel/iron atom ratio of the deposits was analyzed by EDS. The hardness of the alloys was evaluated by Vickers hardness indenter. The internal stress of the deposits was measured by thin film stress measurement using Stoney's formula. Surface morphology and roughness were investigated by scanning electron microscopy (SEM) and atomic force microscopy (AFM). Hardness and internal stress mechanism of the electroplated structure as a function of Fe ion content and current density were revealed. With increasing the iron content, the hardness and internal stress of the deposits increase. An excellent correlation between the increase in the internal stress and the loss of (200) texture were found.
Myung Hwan Byun1，Beom Suck Han2，Yo Seung Song1，Young Keun Kim3，Jin Woo Cho4
(1.Department of Materials Engineering, Hankuk Aviation University, 200-1, Goyang, Korea;
2.Materials and Processing Research Team, Korea Automobile Technology Institute, Chonan, Chungnam 330-912, Korea;
3.Department of Materials Science and Engineering, Korea University, Seoul 136-713, Korea;
4.Nano Technology Based Information & Energy Storage Research Center Korea Electronics Technology Institute, Bundang-gu, Seongnam-Si, 463-816, Korea)
Abstract:Nickel-iron nanocrystalline alloys with different compositions and grain sizes were fabricated by electroplating for MEMS devices. The iron content of the deposits was changed by varying the nickel/iron ion ratio in the electrolyte. X-ray diffraction (XRD) analysis was applied for measuring the strength of the texture and grain size of the deposits. The nickel/iron atom ratio of the deposits was analyzed by EDS. The hardness of the alloys was evaluated by Vickers hardness indenter. The internal stress of the deposits was measured by thin film stress measurement using Stoney''s formula. Surface morphology and roughness were investigated by scanning electron microscopy (SEM) and atomic force microscopy (AFM). Hardness and internal stress mechanism of the electroplated structure as a function of Fe ion content and current density were revealed. With increasing the iron content, the hardness and internal stress of the deposits increase. An excellent correlation between the increase in the internal stress and the loss of (200) texture were found.
Key words:MEMS; electroplating; nanocrystalline nickel-iron alloy; grain size; internal stress; hardness; roughness;
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