简介概要

Silicon Epitaxial Wafer for X Band Double Read－type DDR IMPATT Diodes by Atmosphere／Low Pressure Growth Techniqt

来源期刊：Rare Metals1994年第3期

论文作者：王向武陆春一

摘要：ＳｉｌｉｃｏｎＥｐｉｔａｘｉａｌＷａｆｅｒｆｏｒＸＢａｎｄＤｏｕｂｌｅＲｅａｄ－ｔｙｐｅＤＤＲＩＭＰＡＴＴＤｉｏｄｅｓｂｙＡｔｍｏｓｐｈｅｒｅ／ＬｏｗＰｒｅｓｓｕｒｅＧｒｏｗｔｈＴｅｃｈｎｉｑｔＷａｎｇＸｉａｎｇｗｕａｎｄＬｕＣｈｕｎｙｉ王向武，陆春...

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Silicon Epitaxial Wafer for X Band Double Read－type DDR IMPATT Diodes by Atmosphere／Low Pressure Growth Techniqt

王向武，陆春一

摘要：ＳｉｌｉｃｏｎＥｐｉｔａｘｉａｌＷａｆｅｒｆｏｒＸＢａｎｄＤｏｕｂｌｅＲｅａｄ－ｔｙｐｅＤＤＲＩＭＰＡＴＴＤｉｏｄｅｓｂｙＡｔｍｏｓｐｈｅｒｅ／ＬｏｗＰｒｅｓｓｕｒｅＧｒｏｗｔｈＴｅｃｈｎｉｑｔＷａｎｇＸｉａｎｇｗｕａｎｄＬｕＣｈｕｎｙｉ王向武，陆春...

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