图书来源：二元合金相图及中间相晶体结构 二元合金相图及中间相晶体结构
作 者：唐仁政 田荣璋
出版时间：2009-05
定 价：320元
图书ISBN：978-7-81105-831-4
出版单位：中南大学出版社
WU Youyu YI XinjianWuhan Automotive Polytechnic UniversityHuazhong University of Science and Technology
摘 要：<正> The patterning technologies and process order of high TC（86K） super-conducting film bolometers have been studied. After the deposition, a conventional lithographic process was used to pattern the films with aqueous solution of HCl, and then the films were transferred into a tube furnace for annealing to form superconducting film. It eliminates the degradation of patterning process. The bolometric responsivity of approximately 34. 32 V/W is measured, and the detectivity is greater than 1. 62×108cm · Hz1/2 ·W-1, the noise equivalent powers NEP is 2. 1×10-9W.
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