Improving the fatigue endurance of lead zirconate titanate thin films through PbO interfacial modification
来源期刊：Rare Metals2011年第1期
论文作者：LEI Ronga,REN Yanboa,QIAO Lijiea,GU Hongweib,YUE Zhenxingc,XIE Dand,and CAO Jianglia a Institute for Advanced Materials and Technology,University of Science and Technology Beijing,Beijing ,China b Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing ,China c State Key Laboratory of New Ceramic and Fine Processing,Tsinghua University,Beijing ,China d Institute of Microelectronics,Tsinghua University,Beijing ,China
文章页码：68 - 71
摘 要：The effects of the modification of electrode/ceramic interfaces through a chemical solution deposition-derived PbO buffer layer on the fatigue endurance of lead zirconate titanate（PZT） thin films were investigated.The grain size and the surface roughness of the PZT films increased through PbO interfacial modification.Moreover,the PZT films with PbO interfacial modification had a better crystallographic structure and no evident secondary phases were observed.While the remanent polarization and dielectric constant were reduced,the fatigue endurance was improved.Based on the results,the mechanism for the fatigue endurance improvement was discussed.
LEI Ronga,REN Yanboa,QIAO Lijiea,GU Hongweib,YUE Zhenxingc,XIE Dand,and CAO Jianglia a Institute for Advanced Materials and Technology,University of Science and Technology Beijing,Beijing 100083,China b Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100190,China c State Key Laboratory of New Ceramic and Fine Processing,Tsinghua University,Beijing 100084,China d Institute of Microelectronics,Tsinghua University,Beijing 100084,China
摘 要：The effects of the modification of electrode/ceramic interfaces through a chemical solution deposition-derived PbO buffer layer on the fatigue endurance of lead zirconate titanate（PZT） thin films were investigated.The grain size and the surface roughness of the PZT films increased through PbO interfacial modification.Moreover,the PZT films with PbO interfacial modification had a better crystallographic structure and no evident secondary phases were observed.While the remanent polarization and dielectric constant were reduced,the fatigue endurance was improved.Based on the results,the mechanism for the fatigue endurance improvement was discussed.
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