Practical Control of a Ball-Screw-Driven Stage for Long-Range Nanometer Positioning
来源期刊：Journal Of Wuhan University Of Technology Materials Science Edition2009年第S1期
论文作者：卢礼华
文章页码：186 - 189
摘 要：A DC motor and ball-screw-driven stage is studied for long-range nanometer positioning.The closed-loop system with high-gain PID controller is specially designed for high-precision point-to-point （PTP） positioning.A particular input shape of the closed-loop system is proposed to avoid overshoot and vibration by taking into account the nonlinear characteristics of the feed drive.Friction modeling and identification are avoided and the effect of friction is greatly suppressed by the controller.Experimental and simulated results demonstrate long-range nanometer positioning is achieved without overshoot.In PTP positioning from 10 mm down to 5 nm,the positioning error is within ±5 nm and response dynamic is satisfactory.
卢礼华
Center for Precision Engineering,Harbin Institute of Technology
摘 要：A DC motor and ball-screw-driven stage is studied for long-range nanometer positioning.The closed-loop system with high-gain PID controller is specially designed for high-precision point-to-point （PTP） positioning.A particular input shape of the closed-loop system is proposed to avoid overshoot and vibration by taking into account the nonlinear characteristics of the feed drive.Friction modeling and identification are avoided and the effect of friction is greatly suppressed by the controller.Experimental and simulated results demonstrate long-range nanometer positioning is achieved without overshoot.In PTP positioning from 10 mm down to 5 nm,the positioning error is within ±5 nm and response dynamic is satisfactory.
关键词：
