Preparation and electrical properties of BaPbO₃ thin film

来源期刊：中南大学学报(英文版)2007年第6期

论文作者：陆裕东 王歆 庄志强

文章页码：759 - 759

Key words：BaPbO₃; thin films; sol-gel; spin-coating; electrical resistivity; heat treatment

Abstract: BaPbO₃ thin films were deposited on Al₂O₃ substrates by sol-gel spin-coating and rapid thermal annealing. The microstructure and phase of BaPbO₃ thin films were determined by X-ray diffractometry, scanning electrons microscopy and energy dispersive X-ray spectrometry. The influence of annealing temperature and annealing time on sheet resistance of the thin films was investigated. The results show that heat treatment, including annealing temperature and time, causes notable change in molar ratio of Pb to Ba, resulting in the variations of sheet resistance. The variation of electrical properties demonstrates that the surface state of the film changes from two-dimensional behavior to three-dimensional behavior with the increase of film thickness. Crack-free BaPbO₃ thin films with grain size of 90 nm can be obtained by a rapid thermal annealing at 700 ℃ for 10 min. And the BaPbO₃ films with a thickness of 2.5 μm has a sheet resistance of 35 Ω.□^-1.

基金信息：the Natural Science Foundation of Guangdong Province, China
the Natural Science Foundation of South China University of Technology