沉积温度对CVD-HfC涂层微观结构和力学性能的影响
来源期刊：中南大学学报(自然科学版)2013年第4期
论文作者：赵学嘉 熊翔 王雅雷 李国栋
文章页码：1351 - 1358
关键词：HfC涂层；沉积温度；微观结构；力学性能；化学气相沉积
Key words：HfC coating; deposition temperature; microstructure; mechanical property; chemical vapor deposition
摘 要：采用HfCl4-CH4-H2-Ar体系，利用化学气相沉积法(CVD)在C/C复合材料表面制备HfC涂层。利用X线衍射仪、扫描电子显微镜和纳米压痕测试仪对涂层的微观结构和力学性能进行表征与分析。研究沉积温度对HfC涂层的物相组成、沉积速率、微观结构和力学性能的影响。研究结果表明：在1 400~1 600 ℃沉积温度内，沉积涂层均由单一的立方HfC组成。随着沉积温度的提高，HfC涂层沉积速率逐渐增加；涂层表面HfC晶粒的择优取向面由(220)向(200)转变，涂层组织结构由细柱状晶转变为粗大柱状晶。HfC涂层的显微硬度和弹性模量分别在16~21 GPa和247~282 GPa之间。1 500 ℃沉积HfC涂层的力学性能最佳，其显微硬度和弹性模量分别达到20.29 GPa和282.34 GPa。
Abstract: HfC coatings were prepared on C/C composites by chemical vapor deposition (CVD) with HfCl4-CH4-H2-Ar system. The microstructure and mechanical properties of the as-prepared coating were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and ultra nano-indentor tester. Effects of deposition temperature on phase compositions, deposition rates, microstructure and mechanical properties were investigated. Results show that all of as-prepared coatings exhibit FCC HfC phase. With temperature increasing, the deposition rate increases. The preferential orientation of the HfC crystals changes from (220) to (200), and the coating structure changes from fine to coarse columnar crystals. The hardness and modulus of the HfC coating are in a range of 16-21 GPa and 247-282 GPa, respectively. At 1 500 ℃, the most favorable hardness and modulus are 20.29 GPa and 282.34 GPa, respectively.
赵学嘉，熊翔，王雅雷，李国栋
(中南大学 粉末冶金国家重点实验室，湖南 长沙，410083)
摘 要：采用HfCl4-CH4-H2-Ar体系，利用化学气相沉积法(CVD)在C/C复合材料表面制备HfC涂层。利用X线衍射仪、扫描电子显微镜和纳米压痕测试仪对涂层的微观结构和力学性能进行表征与分析。研究沉积温度对HfC涂层的物相组成、沉积速率、微观结构和力学性能的影响。研究结果表明：在1 400~1 600 ℃沉积温度内，沉积涂层均由单一的立方HfC组成。随着沉积温度的提高，HfC涂层沉积速率逐渐增加；涂层表面HfC晶粒的择优取向面由(220)向(200)转变，涂层组织结构由细柱状晶转变为粗大柱状晶。HfC涂层的显微硬度和弹性模量分别在16~21 GPa和247~282 GPa之间。1 500 ℃沉积HfC涂层的力学性能最佳，其显微硬度和弹性模量分别达到20.29 GPa和282.34 GPa。
关键词：HfC涂层；沉积温度；微观结构；力学性能；化学气相沉积
ZHAO Xuejia, XIONG Xiang, WANG Yalei, LI Guodong
(State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, China)
Abstract:HfC coatings were prepared on C/C composites by chemical vapor deposition (CVD) with HfCl4-CH4-H2-Ar system. The microstructure and mechanical properties of the as-prepared coating were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and ultra nano-indentor tester. Effects of deposition temperature on phase compositions, deposition rates, microstructure and mechanical properties were investigated. Results show that all of as-prepared coatings exhibit FCC HfC phase. With temperature increasing, the deposition rate increases. The preferential orientation of the HfC crystals changes from (220) to (200), and the coating structure changes from fine to coarse columnar crystals. The hardness and modulus of the HfC coating are in a range of 16-21 GPa and 247-282 GPa, respectively. At 1 500 ℃, the most favorable hardness and modulus are 20.29 GPa and 282.34 GPa, respectively.
Key words:HfC coating; deposition temperature; microstructure; mechanical property; chemical vapor deposition
