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Properties of Ultra-Thin Hafnium Oxide and Interfacial Layer Deposited by Atomic Layer Deposition Young-Bae Kim1,Taeho Lee2,Jinho Ahn2,Duck-Kyun Choi1,Kyung-Il Hong1 (1.Department of Ceramic...) Abstract:Ultra-thin hafnium-oxide gate dielectric films deposited by atomic layer deposition technique using HfCl4 and H2O precursor on a hydrogen-terminated Si substrate were investigated. X-ray......
CORROSION BEHAVIOR OF Cu-Nb AND Ni-Nb AMORPHOUS FILMS PREPARED BY ION BEAM ASSISTED DEPOSITION F.Zeng1,F.Pan1,B.Zhao1,D.M.Li1 (1.Laboratory of Advanced Materials, Department of Materials Science and Engineering, Tsinghua University,Beijing 100084, China) Abstract:The Cu25Nb75 and Ni45Nb55 amorphous films with about 500nm thickness were prepared by ion beam assisted deposition (IBAD......
Kinetic Monte Carlo simulation of growth of BaTiO3 thin film via pulsed laser deposition ZHENG Xue-jun(郑学军)1, 2, YANG Bo(杨 博)1, ZHU Zhe(朱 哲)1, WU Bo(吴 波)1, MAO Yu-liang(毛宇亮)1 1. Faculty... deposition(PLD). Not only the atoms deposition and adatoms diffusion, but also the bonding of adatoms were considered distinguishing with the traditional algorithm. The effects of substrate temperature......
Structural and optical properties of tellurium films obtained by chemical vapor deposition(CVD) MA Yu-tian(马玉天)1, 2,GONG Zhu-Qing(龚竹青)1, XU Wei-Hong(徐卫红)1, HUANG Jian(黄 坚)1 1. School...; Abstract: Tellurium thin films were prepared by the chemical vapor deposition method......
Plasma spray-physical vapor deposition toward advanced thermal barrier coatings:a reviewMei-Jun Liu,Gao Zhang,Yan-Hong Lu,Jia-Qi Han,Guang-Rong Li,Cheng-Xin Li,Chang-Jiu Li,Guan-Jun YangState Key Laboratory for Mechanical Behavior of Materials,School of Materials Science and Engineering,Xi’an Jiaotong University摘 要:Plasma spray–physical vapor deposition......
were prepared by micro-positive chemical vapor deposition (CVD) with self-designed CVD furnace, using propylene as carbon source gas, nitrogen and hydrogen as carrier gas and dilution gas. The density... light microscope, scanning electron microscope and transmission electron microscope, respectively. A new deposition mechanism of isotropic pyrocarbons-electromagnetic field fluidization deposition......
Growth of straight carbon nanotubes by simple thermal chemical vapor deposition ZOU Xiao-ping(邹小平) 1,2,3,4, H. ABE 3, T. SHIMIZU 3, A. ANDO 5, H. TOKUMOTO 3,6, ZHU Shen-ming(朱申敏)4, ZHOU Hao-shen(周... April 2006; accepted 25 April 2006 Abstract: Straight carbon nanotubes (CNTs) were achieved by simple thermal chemical vapor deposition(STCVD) catalyzed by Mo-Fe alloy catalyst on silica supporting......
Optical and Micro-Structural Properties of ZnO Thin Films Grown on Silicon Substrate by Pulsed Laser Deposition Xue Shoubin1,Tian Deheng1,Hu Lijun1,Wu Yuxin1,Zhuang Huizhao1,Xue Chengshan1,He... temperatures and oxygen pressures by pulsed laser deposition (PLD) using a Nd∶YAG laser with the wavelength of 1064 nm. X-ray diffraction (XRD), photoluminescence (PL), scanning electron microscopy (SEM......
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Thermodynamic Analysis of Chemical Vapor Deposition of BCl3-NH3-SiCl4-H2-Ar System李赞,CHENG Laifei,刘永胜,YE FangScience and Technology on Thermostructural Composite Materials Laboratory, Northwestern... the kinetic experimental results. The effects of parameters(i e, partial pressure of reactants, deposition temperature and total pressure) on the distribution regions of solid phase products were analyzed......
