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Ta_2O_5薄膜制备的研究现状及进展 高亮1,杨建广1,陈胜龙1 (1.中南大学冶金科学与工程学院,长沙,410083) 摘要:Ta_2O_5薄膜具有很好的电学性能和光学性能,制备方法种类繁多,如溶胶-凝胶法(Sol-gel),化学气相沉积法,电子束蒸发技术,溅射法,Ta层阳极氧化或热氧化法,离子辅助沉积法(IBAD),原子层沉积法(ALD)等.评述了现有各种制备方法的优缺点,综述了Ta_2O_5薄膜各种方法制备的条件,薄膜的功能性质等,并评析了金属有机化合物为前驱体制备性能优良的Ta_2O_5薄膜的前景. 关键词:Ta_2O_5; 薄膜; 制备方法; Ta_2O_5; thin films; preparation method; [全文内容正在添加中] ......
of the CNTs reinforced Cu and Al based composite materials in recent years was reviewed. Five main aspects including the pretreatment of CNTs, the preparation of CNTs-metal composite powder, the preparation of CNTs-metal composites, the interfacial bonding mechanism and the reinforcement mechanism of CNTs were discussed. Key words: carbon nanotubes; copper-based composite; aluminum-based......
. The preparation processes of ZAO were expounded. The preparation technologies, namely sol-gel method, metal chemical vapor deposition, magnetron sputtering, pulsed laser deposition and thermal spray of ZAO films were analyzed. Finally, the directions of research and development were described. Key words: Al-doped-ZnO; typical properties; preparation processes; powder; targets; thin films 随着半导体,计算机和太阳能......
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Effect of preparation conditions on selective oxidation of propane to acrylic acid YU Zhen-xing(于振兴), ZHENG Wei(郑 伟), XU Wen-long(徐文龙), ZHANG Yu-hang(张宇航), FU Hong-ying(付红英), ZHANG...; Abstract: The effects of chemical composition and preparation conditions, especially calcination atmosphere......
; 文献标志码:A Research progress in field emission properties and controllable preparation of one-dimensional W nano-materials WANG Chao, HE Yue-hui, PENG Chao-qun, WANG Shi-liang, LIU Xin.... The impact factors on the field emission properties of different preparation methods were analyzed. It is pointed out that the electric field enhancement......
Techniques for the Preparation of Porous MetalsPeisheng LIU1,2), Bing YU2), Anmin HU2), Kaiming LIANG2) and Shouren GU21)The Key Laboratory of Beam Technology and Material Modification of Ministry... greatly and swiftly in recent years. In this paper, main types of these materials are described briefly, and their preparation methods are related primarily, with the purpose offering some clues......