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Effects of deposition parameters on microstructure and thermal conductivity of diamond films deposited by DC arc plasma jet chemical vapor deposition QU Quan-yan(瞿全炎)1, 2, QIU Wan-qi(邱万奇)1, ZENG... the effect of the CH4 concentration on the thermal conductivity(s) of diamond films produced by microwave chemical vapor deposition(MWCVD) and hot filament chemical vapor deposition (HFCVD), respectively......
-filament chemical vapor deposition (HFCVD). The interface characteristics, internal stress and adhesion strength were investigated by scanning electron microscopy, Raman analysis and indentation test... and the low residual stress in the film. Key words: diamond film; composites layer; electroplating; adhesion; chemical vapor deposition 1 Introduction Thermal consideration in the electronic package......
, University of Jinan, Ji’nan 250022, China;5. The 41st Institute of China Electronics Technology Group Corporation, Qingdao 266555, China)Abstract:Metal organic chemical vapor deposition (MOCVD.... The modulate accuracy of the temperature field approximately equals the change of the average temperature corresponding to the change of the coil position.Key words:metal organic chemical vapor deposition......
/TiCN/Al2O3/TiN multilayer coatings on cemented carbide by chemical vapor deposition CHEN Xiang-ming1, 2, YI Dan-qing1, HUANG Dao-yuan1, LI Xiu-ping2, LIU Hui-qun1, WU Chun-ping1 (1. School of Materials... range of 650-950 ℃ in different times were carried out on the cemented carbide coated by multilayer TiN/TiCN/Al2O3/TiN coating prepared by chemical vapor deposition (CVD) method. The phase component......
, Mudanjiang 157012, China Received 10 April 2006; accepted 25 April 2006 Abstract: A new method, called growing-etching repetitional process based on hot filament chemical vapor deposition, was proposed... it is helpful to the films’ quality, a series of experiments were done. The results show that the new method can enhance the orientation of the chemical vapor deposition diamond films, reduce......
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Compositional Dependence of Surface Morphology and Electrical Properties of GaInAsSb Alloys Grown by Metalorganic Chemical Vapor Deposition宁永强,周天明,张宝林,蒋红,李树纬,元光,田园,金亿鑫摘 要:ＣｏｍｐｏｓｉｔｉｏｎａｌＤｅｐｅｎｄｅｎｃｅｏｆＳｕｒｆａｃｅＭｏｒｐｈｏｌｏｇｙａｎｄＥｌｅｃｔｒｉｃａｌＰｒｏｐｅｒｔｉｅｓｏｆＧａＩｎＡｓＳｂＡｌｏｙｓＧｒｏｗｎｂｙＭｅｔａｌｏｒｇａｎｉｃＣｈｅｍｉｃａｌＶａｐｏｒＤｅｐｏｓｉｔｉｏｎＮｉｎ...关键词:......
Preparation of Anhydrous LnCl3(Ln=Eu, Er, Lu) by Chemical Vapor Transport WANG Yu-hong1,LI Ying1,WANG Lin-shan1 (1.Department of Chemistry, Northeastern University, Shenyang 110006, China) Abstract:Anhydrous lanthanide chlorides LnCl3(Ln=Eu, Er, Lu) which are not easy to prepare in other ways were prepared by chemical vapor transport(CVT) method. Ln2O3 reacted with an excess of Al2Cl6 at 300......
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in microwave plasma enhanced chemical vapor deposition (MPCVD) reactor with different deposition parameters. Adherent nanocrystalline diamond films were directly deposited on this steel substrate...Plasma enhanced diamond deposition on steel and Si substrates Y.S. Li1,Q. Yang2,A. Hirose1,Y. Tang1,C. Xiao1,W. Chen1 (1.Plasma Physics Laboratory, University of Saskatchewan, Saskatoon, SK S7N 5E2......
