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-target magnetron sputtering system in an Ar-N 2 gas mixture. The Ti-Si-N films were investigated by characterization techniques such as X-ray diffraction (XRD), atomic force microscope (AFM), electron... that magnetron sputtering is a promising method to deposit hard films onto soft substrate.关键词:......
; Abstract: Ta2O5 thin films were deposited by DC reactive magnetron sputtering followed by rapid thermal... magnetron sputtering has lots of advantages[14], such as low deposition temperature and better adhesion. The thickness and stoichiometric composition of the films can be easily controlled. The complexity......
magnetron sputtering for orthopedic implant applications: A comparative study Ashish DAS1, 2, Mukul SHUKLA1, 3, 4 1. Department of Mechanical Engineering, Motilal Nehru National Institute of Technology...-implants, such as osteointegration and antibacterial character. In the present study, thin hopeite coatings were produced by Pulsed laser deposition (PLD) and radio frequency magnetron sputtering (RFMS......
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TRIBOLOGICAL AND HIGH SPEED TURNING PERFORMANCE IN Ti1-xAlxN COATINGS PREPARED BY CLOSE-FIELD UNBALANCED MAGNETRON SPUTTERING Y.G. Shen1,Z.F. Zhou1,T.H. Wong1,K.Y. Li1,M. Escursell1,P.W. Shum1...-aluminium-nitride (Ti1-xAlxN) coatings were deposited by close-field unbalanced magnetron sputtering on M42 steel substrates and WC-6wt%Co inserts at 450℃. The tribological behavior was analyzed......
by magnetron sputtering at 100 °C WANG Lin-qing(王林青)1, 2, ZHOU Yong-tao(周永涛)3, 4,WANG Jun-jun(王军军)3, 4, LIU Xue-qin(刘雪芹)3, 4 1. School of Science, Chongqing University of Technology, Chongqing 400054... of Springer Nature 2019 Abstract: Hydrogenated microcrystalline silicon (μc-Si:H) films were prepared on glass and silicon substrates by radio frequency magnetron sputtering at 100 °C using a mixture of argon......
Tribological behavior of magnetron sputtering CrMoN/MoS2 composite coatingsYuelan DI,Zhihai CAI,Ping ZHANG,Zhen YANG,Qi LI and Wei SHEN Department of Equipment Remanufacturing Engineering,Academy of Armored Forces Engineering,Beijing 100072,China摘 要:CrMoN composite coatings were deposited on the surface of the stainless steel by magnetron sputtering......
successfully prepared by DC magnetron sputtering with Ar as working gas, N2 and O2 as reactive gas, 99.9% titanium as the target and is copper slice as the substrate. In this article, the optical...:spectrum selecting absorbent film; TiNxOy; magnetron sputtering; [全文内容正在添加中] ......
Some New Views on the Principles of Magnetron Sputtering FANG Kai-ming1,TONG Hong-Hui1,ZHAO Jia-xue1 (1.Southwestern Institute of Physics, Chengdu, 610041, Sichuan, P. R. China) 摘要:In this paper, some common phenomena in magnetron sputtering are freshly analyzed and discussed on the basis of the motion of electrons in non-uniform orthogonal electric and magnetic fields. There exist magnetic......
Applications of Cr-Based Metal Nitride Hard Coatings Using Multi-Magnetron Sputtering Sources and Elemental Metal Targets D.G. Teer1,Eric Wiemann2,Shicai Yang1 (1.Teer Coatings Ltd., West Stone...) 摘要:Cr-based nitride hard coatings were produced by multi-magnetron sputtering sources using elemental metal materials. Cr, Ti, Mo, V, Al, and Y target materials were used for the metal sources......
