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Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027, China) Abstract: Ternary Zn1-xCdxO alloying films were deposited on silicon substrates by a reactive magnetron sputtering method... and that ZnCdO grains with c-axis preferred orientation nucleate directly on substrate surface. Key words: ZnCdO; microstructure; sputtering CLC number: TG304 Document code: A 1 INTRODUCTION......
EFFECT OF Ar PRESSURE ON STRUCTURAL AND ELECTRICAL PROPERTIES OF Cu FILMS DEPOSITED ON GLASS BY DC MAGNETRON SPUTTERING L.Q.Pan1,F.P.WANG1,P.Wu1,H.Qiu1,Y.Tian1 (1.Department of Physics, University... of 630-1300nm were deposited on glass substrates withoutheating by DC magnetron sputtering in pure Ar gas. Ar pressure was controlled to0.5, 1.0 and 1.5Pa respectively. The target voltage was fixed at 500V......
Through-thickness texture gradient of tantalum sputtering targetChao Deng,Shi-Feng Liu,Xiao-Bo Hao,Jing-Li Ji,Qing Liu,Hai-Yang FanCollege of Materials Science and Engineering, Chongqing University摘 要:For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance.In this paper, through-thickness texture......
Application of Magnetron Sputtering in Fabricating MEMS Microbatteries SHEN Wan1,YANG Zhi-min1,DU Jun1,MAO Chang-hui1,XING Guang-jian1 (1.Research Center of Energy Materials & Technology, General... microbatteries are reviewed and suggestedmagnetron sputtering in fabricating a high-performance microbattery. The technics as annealing are analyzed. The microbattery with a LiNi1-x Cox O2 cathode exhibited......
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PREPARATION AND SURFACE CHARACTERIZATION OF TiO2 THIN FILMS ON GLASS BY MAGNETRON SPUTTERING METHOD J.X.Zhang1,H.Shen2,L.S.Yin3 (1.Department of Physics,Zhongshan University,Guangzhou 510275,China... deposited on glass substrates by magnetron sputtering method,then sintered the Ti thin films in air atmosphere and finally TiO2 transparence thinfilms on glass substrates were obtained. The structure......
Fabrication of NiO Buffer Layer for YBCO Coated Conductors by Combining Sputtering and SOE Method Yang Haitao1,Yuan Guansen2,Wang Xiaohua1,LIU Huizhong2,Yang Jian2,Gu Hongwei2 (1.National Center... sputtering and SOE method to obtain crack-free and cube textured NiO layer were reported. Ni tapes prepared by the combination of rolling and recrystallization were used for this work. A coating of Ni......
Sputtering Preparation and Magneto-optical Properties of GdTbFeCo Thin Films黄致新College of Physical Science and Technology,Cental China Normal University摘 要:Amorphous GdTbFeCo magnetic thin films were successfully prepared on glass substrates by RF magnetron sputtering system from a mosaic target.The influences of sputtering parameters on the magneto......
Trans. Nonferrous Met. Soc. China 22(2012) s729-s734 Synthesis and properties of Cr-Al-Si-N films deposited by hybrid coating system with high power impulse magnetron sputtering (HIPIMS) and DC pulse sputtering Min Su KANG1, Tie-gang WANG1, 2, Jung Ho SHIN3,4, Roman NOWAK5, Kwang Ho KIM1, 3 1. School of Materials Science and Engineering, Pusan National University, Busan 609-735, Korea; 2. State......
