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CVD-SiC在不同气氛中的叠加氧化行为 成来飞1,栾新刚1,刘小冲1,罗茜1 (1.西北工业大学超高温结构复合材料国防科技重点实验室,西安,710072) 摘要:采用化学气相沉积法(Chemical Vapor Deposition,CVD)制备了CVD-SiC陶瓷基片并在1500℃空气中进行预氧化处理,对比研究了预氧化前后CVD-SiC分别在1100,1300和1500℃静态水氧耦合环境下的氧化行为.采用扫描电子显微镜和X-射线衍射分析不同叠加氧化温度条件下表面形貌和物相演变规律.结果表明,预氧化后氧化(叠加氧化)和预氧化前氧化(水氧氧化)具有相似的氧化机理,均呈现出典型的抛物线型模式,两者的活化能分别为116kJ/mol和98.9 kJ/mol. 关键词:CVD-SiC; 叠加氧化; 水氧氧化; chemical vapor deposition; silicon......
substrate by chemical vapor deposition[J]. Acta Physico-Chimica Sinica, 2016, 32(3): 787-792. [5] LEE S, LEE K, ZHONG Z. Wafer Scale Homogeneous Bilayer Graphene Films by Chemical Vapor Deposition[J]. Nano.... The control of graphene double-layer formation in copper-catalyzed chemical vapor deposition[J]. Carbon, 2012, 50(10): 3682-3687. [21] WU W, YU Q, PENG P. Control of thickness uniformity and grain size......
composite surface without catalyst by chemical vapor deposition (CVD) using CH3SiCl3 as precursor. SEM images of the CVD-product reveal that some long nanowires have grown to tens of micrometers with some... is the main mechanism for the CVD-SiC nanowires. Key words: SiC nanowires; C/C composite; chemical vapor deposition; growth mechanism; characterization 1 Introduction Carbon fiber reinforced carbon......
on the surface of carbon fibers by catalytic chemical vapor deposition using electroplated Ni as catalyst. The modification and mechanism of nanofibers on the pyrocarbon deposition during chemical vapor...Effect of nanofibers at surface of carbon fibers on microstructure of carbon/carbon composites during chemical vapor infiltrationXIAO Peng(肖鹏), CHEN Jie(陈洁), XU Xian-feng(徐先锋), LU Xue-feng(卢雪峰......
cells with efficiency up to 6. 05% without anti-reflection coating. Key words:poly-crystalline silicon thin film; RTCVD (rapid thermal chemical vapor deposition); SSP (silicon sheet from powder......
filament chemical vapor deposition (HFCVD); diamond films 1 Introduction Diamond films grown by hot filament chemical vapor deposition (HFCVD) are widely used today because of their attractive features... on diamond and non-diamond substrates such as Si, Cu, Mo, Al2O3 [1] and cemented carbide [2-4]. However, chemical vapor deposition (CVD) diamond films are polycrystalline and highly defective, which restricts......
,则容易生长成<220>取向的多角形晶粒. 关键词:TaC涂层；化学气相沉积；择优取向；微观形貌 中图分类号:TB 332 文献标识码:A Surface morphology of TaC coating prepared by chemical vapor deposition and preferential growth... 410083, China) Abstract: TaC film was deposited by chemical vapor deposition technique at different temperatures with TaCl5-Ar-C3H6 system. The surface morphology and preferential growth of TaC......
vapor deposition on Nb substrates. The effects of B/C ratio of reaction gas on film morphology, growth rate, chemical bonding states, phase composition and electrochemical properties of each deposited... filament chemical vapor deposition (HFCVD); boron doping; electrochemical behavior; niobium substrate; electrode 1 Introduction Diamond possesses many unique physical and chemical properties......
by radio-frequency plasma-enhanced chemical vapor deposition (rf-PCVD) were investigated. The coatings were characterized by energy dispersive X-ray analysis, X-ray diffraction, transmission electron... coefficient is a little higher than that of TiN. Key words: plasma-enhanced chemical vapor deposition; Ti-B-N coating; hardness; wear-resistance 近年来纳米超硬薄膜材料在要求耐磨损, 耐腐蚀, 抗氧化的工件表面改性领域应用潜力巨......
化学气相沉积碳化锆涂层的研究进展 刘佳1,张立同1,成来飞1,栾新刚1,刘巧沐1 (1.西北工业大学超高温结构复合材料国防科技重点实验室,西安,710072) 摘要:碳化锆具有众多优异的性能,能够适应超高音速飞行,再入大气和火箭推进系统等复杂,苛刻的极端环境,是最具应用潜力的超高温材料之一.综述了化学气相沉积制备碳化锆涂层,介绍了取得的研究成果和存在的问题,指出了今后的研究目标和发展方向. 关键词:化学气相沉积; 碳化锆; 涂层; chemical vapor deposition(CVD); zirconium carbide; coatings; [全文内容正在添加中] ......
