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): 322-330. [4] MARULANDA D M, OLAYA J J, PIRATOBA U, A, CAMPS E. The effect of bilayer period and degree of unbalancing on magnetron sputtered Cr/CrN nano-multilayer wear and corrosion [J]. Thin Solid Films, 2011, 519(6): 1886-1893. [5] SUN P L, SU C Y, LIOU T P, HSU C H, LIN C K. Mechanical behavior of TiN/CrN nano-multilayer thin film deposited by unbalanced magnetron sputter process [J]. Journal......
effect in nano-multilayer films[J]. Journal of Inorganic Materials, 2006, 21(6): 1292-1300. [14] BULL S J, JONES A M. Multilayer coatings for improved performance[J]. Surface and Coatings Technology... of more than 100 N. Key words: TiAlCrN coating; TiAlCrN/CrN multilayer coatings; arc ion plating; microhardness; adhesion properties  ......
): 67-70. DENG Lian-wen, JIANG Jian-jun, FENG Ze-kun, et al. High magnetic loss nano-multilayer film for control of EMI[J]. Journal of Huazhong University of Science and Technology, 2004, 32(11): 67-70...吸波性能的影响 图3 FeCoNbZr-SiO2纳米颗粒膜磁谱及其不同电导率时的吸波性能 Fig.3 Complex permeability spectra and microwave absorbing ability of FeCoNbZr-SiO2 nano-granular film with different conductivities 图4所示为共振......
and oxidation behavior of TiN/AlN nano-multilayer films[J]. Tribology International, 2006, 39: 332-341. [12] CHANG Pei-ling, WU Yu-chun, LAI Su-jung. Size effects on c- to a-Al2O3 phase transformation[J.../TiCN/Al2O3/TiN multilayer coatings on cemented carbide by chemical vapor deposition CHEN Xiang-ming1, 2, YI Dan-qing1, HUANG Dao-yuan1, LI Xiu-ping2, LIU Hui-qun1, WU Chun-ping1 (1. School of Materials......
行解释. REFERENCES [1] 孔 明, 岳建玲, 李戈扬. 陶瓷硬质纳米多层膜研究进展[J]. 无机材料学报, 2010, 25(2): 113-119.KONG Ming, YUE Jian-ling, LI Ge-yang. Research development of hard ceramic nano-multilayer films[J]. Journal... contents were deposited on the Si substrate by means of radio frequency (RF) magnetron sputtering method. By X-ray diffractometry (XRD), high resolution transmission electron microscopy (HRTEM) and nano......
, Science and Technology, 2014, 49(5): 345-351. [24] LIU B J, DENG B, TAO Y. Influence of niobiumion implantation on the microstructure, mechanical and tribological properties of TiAlN/CrN nano-multilayer coatings[J]. Surface and Coatings Technology, 2014, 240: 405-412. [25] LIU H X, XU Q, JIANG Y H, WANG C Q, ZHANG X W. Corrosion resistance and mechanical property of AZ31 magnesium alloy by N/Ti......
, Jiang B. Comparison in mechanical and tribological properties of CrTiAlMoN and CrTiAlN nano-multilayer coatings deposited by magnetron sputtering [J]. Applied Surface Science, 2016, 363: 217–224. [10...J. Cent. South Univ. (2017) 24: 2238-2244 DOI: https://doi.org/10.1007/s11771-017-3633-3 Effect of cathode composition on microstructure and tribological properties of TiBN nanocomposite multilayer......
, 2014, 68(4): 87-93. [20] WANG Tao, ZHANG Guo-jun, JIANG Bai-ling. Comparison in mechanical and tribological properties of CrTiAlMoN and CrTiAlN nano-multilayer coatings deposited by magnetron...应力测试仪[32]测量基体镀膜前后曲率半径的变化,从而计算出多层膜内应力,硅基体的弹性模量为190 GPa,泊松比为0.2.采用型号为Nano Indenter G200的纳米压痕仪及连续刚度法测量薄膜的硬度,压入深度约为50 nm.采用型号为WS-2005的涂层附着力划痕仪[33]测定多层膜与基体间的结合力,加载速率100 N/min,最大载荷100 N,划痕长度4 mm,划痕速度4 mm......