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process in semiconductor wafer fabrication systems using extended hybrid Petri nets ZHOU Bing-hai(周炳海), PAN Qing-zhi(潘青枝), WANG Shi-jin(王世进), WU Bin(吴 斌) (School of Mechanical Engineering, Shanghai...; Abstract: To describe a semiconductor wafer fabrication flow availably, a new modeling method of extended hybrid Petri nets (EHPNs) was proposed. To model the discrete part......
Nature 2021 Abstract: Wafer bin map (WBM) inspection is a critical approach for evaluating the semiconductor manufacturing process. An excellent inspection algorithm can improve the production... Transactions on Semiconductor Manufacturing, 2003, 16(3): 535-542. DOI: 10.1109/TSM.2003.815204. [2] HSU S C, CHIEN C F. Hybrid data mining approach for pattern extraction from wafer Bin map......
Electrochemical behavior and polishing properties of silicon wafer in alkaline slurry with abrasive CeO2 SONG Xiao-lan(宋晓岚)1, XU Da-yu(徐大余)1, ZHANG Xiao-wei(张晓伟)1, SHI Xun-da(史训达)2, JIANG Nan(江 楠)1, QIU Guan-zhou(邱冠周)1 1. Department of Inorganic Materials, School of Resources Processing and Bioengineering, Central South University, Changsha 410083, China; 2. Silicon Wafer Manufacture......
Effect of Rapid Thermal Process on Oxygen Precipitates in Heavily Sb-Doped Silicon Wafer Xu Yuesheng1,Hao Qiuyan1,Teng Xiaoyun1,Liu Caichi1,Zhao Liwei1,Sun Shilong1 (1.Institute of Information.... The experiment results show that high density of oxygen precipitates is observed in heavily Sb-doped wafer. It is found that the oxygen precipitates in heavily Sb-doped silicon are enhanced at high cooling rate......
improve the current understanding of the energy transport in the rapid thermal processing and the wafer temperature monitor and control level.Key words:silicon wafer; thermal transport properties...Effects of thermal transport properties on temperature distribution within silicon waferWANG Ai-hua(王爱华)1, NIU Yi-hong(牛义红)1, CHEN Tie-jun(陈铁军)1, P. F. HSU2(1. School of Materials and Metallurgy......
. Key words: laser bending; silicon sheet; pulsed laser; simulation 1 Introduction Single-crystal silicon as major semiconductor materials is widely used in various fields. The reason lies not only... the wafer plane. But with its plastic reshape, the microstructure can be created outside the wafer. On the other hand, silicon forming needs furnace heating the whole wafer to the ductile temperature......
Electrochemical behaviors of silicon wafers in silica slurryXiaolan Song1), Haiping Yang1), Xunda Shi2), Xi He1), and Guanzhou Qiu1) 1) Department of Inorganic Materials, School of Minerals Processing and Bioengineering, Central South University, Changsha 410083, China 2) Silicon Wafer Manufacture Department, Grinm Semiconductor Materials Co. Ltd., Beijing 100088, China摘 要: of Microelectronics, Hebei University of Technology, Tianjin 300130, China
Received 10 April 2006; accepted 25 Apirl 2006
Abstract: The adsorption mechanism of particle on the surface of silicon wafer after... words: megasonic cleaning; nonionic surfactant; particle removal; silicon wafer; adsorption
1 Introduction
For ULSI fabrication, the particle contamination on silicon wafer critically impacts final......Effect of surfactant on removal of particle contamination on Si wafers in ULSI
来源： 《中国有色金属学报(英文版)2006年第z1期》——檀柏梅 李薇薇 牛新环 王胜利 刘玉岭
Investigation on Adsorption State of Surface Adsorbate on Silicon Wafer刘玉岭,刘纳,曹阳摘 要:１ＩｎｔｒｏｄｕｃｔｉｏｎＴｈｅｍｉｎｉｍａｌｆｅａｔｕｒｅｓｉｚｅｏｎｔｈｅｍｉｃｒｏｅｌｅｃｔｒｏｎｉｃｄｅｖｉｃｅｓｈａｄｂｅｎｄｅｖｅｌｏｐｅｄｔｏｌｅｓｔｈａｎ０．３５μｍ．Ｔｈｉｓｖａｌｕｅｗｉｌｃｈａｎｇｅｔｏ０．０５μｍｉｎｎｅｘ...关键词:......
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