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实测E值介于Voigt和Reuss规则预测值之间,bcc和非晶Cu-W膜实测E值分别高于和低于预测值;晶态Cu-W膜实测H值与Voigt规则计算值的符合性优于非晶膜,薄膜结构对力学性能预测可靠性影响较大. 关键词:Cu-W合金薄膜; 微观结构; 非晶态; 力学性能; Cu-W alloy thin films; microstructure; amorphous; mechanical...溅射沉积Cu-W合金薄膜的结构及力学性能 郭中正1,孙勇1,郭诗玫2,段林昆1,李玉阁1 (1.昆明理工大学云南省新材料制备与加工重点实验室,云南,昆明,650093;2.曲靖师范高等专科学校,云南,曲靖,655000) 摘要:用磁控共溅射法制备Cu-W合金薄膜,运用EDX,XRD,TEM,SEM和纳米压痕仪对薄膜成分,结构和力学性能及其关系进行了研究.结果表明,含W较低的Cu_(82.1......
2012 Abstract: Immiscible Cu-W alloy thin films were prepared using dual-target magnetron sputtering deposition process. The structure evolution of Cu-W thin films during preparation was investigated... solubility of Cu-W alloy films with different W contents The position change of the diffraction peaks of Cu-W film was caused by solid solubility and the internal stress of thin films. The 2θ of (111......
Enhanced adhesion of Cu-W thin films by ion beam assisting bombardment implanting ZHOU Ling-ping(周灵平)1, 2, WANG Ming-pu(汪明朴)1, WANG Rui( KKKkkkkk(王 瑞)2, LI Zhou(李 周)1, ZHU Jia-jun(朱家俊)2, PENG... of the substrates surface treating technique on the adhesive strength of Cu-W thin films were studied. It is found that the technique of ion beam assisting bombardment implanting of W particles can remarkably......
Cu-W薄膜表面形貌各向异性与相结构 徐可为1,汪渊1,马栋林3,陈元华1,范多旺4 (1.西安交通大学金属材料强度国家重点实验室,西安,710049;2.兰州交通大学机械与动力学院,兰州,730070;3.兰州理工大学电信工程学院,兰州,730050;4.兰州交通大学光电技术与智能控制教育部重点实验室,兰州,730070) 摘要:提出了-种基于离散小波变换和分形几何概念定量描述薄膜表面形貌各向异性的新方法,并据此研究了磁控溅射Cu-W薄膜表面结构特征随退火温度的演变.结果表明,薄膜表面聚合过程有两个不同阶段:孔洞处形核和颗粒生长;薄膜表面形貌分形维数可很好地描述表面粗化程度.研究发现,表面形貌各向异性变化趋势对相结构变化敏感.指出这种结合小波变换和分形几何概念表征薄膜表面形貌的方法,可以较灵敏地探测到Cu-W薄膜表面结构各向异性变化. 关键词:Cu-W薄膜; 表面各向异性; 相......
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EFFECT OF RESIDUAL STRESS ON THE MARTENSITIC TRANS- FORMATION OF SPUTTER-DEPOSITED SMA THIN FILMS D.Xu1,B.C.Cai1,L.Wang1 (1.Information Storage Research Center, Shanghai Jiao Tong University, Shanghai 200030, China) Abstract:TiNi thin films were sputter-deposited on circular single-crystal silicon substrates un-der various sputtering parameters. The crystal structure and residual stress......
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of thin films is better than that of aluminum alloy when the sintering temperature is higher than 300 ºC. And the excellent corrosion protective effect is obtained by single-layer coating when... thin films using sol-gel method. The effect of the contents of H2O and PDMS on thin films was studied. When the volume ratio of H2O to TEOS is 0.5, the optimum quality of thin films is obtained......
Characterization of CuInS2 thin films prepared by sulfurization of Cu-In precursor YAN You-hua(阎有花), LIU Ying-chun(刘迎春), FANG Ling(方 玲), ZHU Jing-sen(朱景森), ZHAO Hai-hua(赵海花), LI De-ren(李德仁), LU...: CuInS2 thin films were prepared by sulfurization of Cu-In precursors. The influences of the deposition sequence of Cu and In layers, such as Cu/In, Cu/In/In, and In/Cu/In, on structure, topography......
