简介概要

表面波等离子体暴露下铜表面的氧化特性(英文)

来源期刊:材料与冶金学报2011年第1期

论文作者:吉田圭佑 川添博光

文章页码:58 - 129

摘    要:Surface wave plasma(SWP) is a kind of low temperature plasma which can be utilized for material development.In this research,argon and oxygen were used as a working gas for an SWP experiment and the influence of the plasma irradiation on a copper surface was examined.Particular,relation between the spatial characteristics of SWP and wetting characteristics was examined.As a result,it was found that spatial characteristics of the SWP affected the wetting characteristics and the oxidation characteristics.

详情信息展示

表面波等离子体暴露下铜表面的氧化特性(英文)

吉田圭佑1,川添博光1

1. 日本鸟取大学

摘 要:Surface wave plasma(SWP) is a kind of low temperature plasma which can be utilized for material development.In this research,argon and oxygen were used as a working gas for an SWP experiment and the influence of the plasma irradiation on a copper surface was examined.Particular,relation between the spatial characteristics of SWP and wetting characteristics was examined.As a result,it was found that spatial characteristics of the SWP affected the wetting characteristics and the oxidation characteristics.

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