Preparation of DyPt2 Films by Using Magneto Controlled Sputtering and Phase Transformation of Dy/Pt Alloy Films
来源期刊:Journal of Rare Earths2007年第S2期
论文作者:成钢 顾正飞 汪元亮 赵家成 周怀营
文章页码:87 - 89
摘 要:DyPt2 films were prepared by alternate deposition thin Dy and Pt layers on glass substrates by DC magneto controlled sputtering method. The XRD data indicated that for as-deposited Dy/Pt films, and the periodic layered structures along thickness direction were evidenced with low angle X-ray scattering. With increasing annealing temperature, the compounds of DyPt, DyPt2 and DyPt3 were formed successively at temperature ranging from 300 to 400 ℃. It was found that the composition reaction DyPt+DyPt3→2DyPt2 took place at 500 ℃. After annealing at 500 ℃ for 1 h, the compounds DyPt and DyPt3 transformed completely into the DyPt2 compound.
成钢,顾正飞,汪元亮,赵家成,周怀营
摘 要:DyPt2 films were prepared by alternate deposition thin Dy and Pt layers on glass substrates by DC magneto controlled sputtering method. The XRD data indicated that for as-deposited Dy/Pt films, and the periodic layered structures along thickness direction were evidenced with low angle X-ray scattering. With increasing annealing temperature, the compounds of DyPt, DyPt2 and DyPt3 were formed successively at temperature ranging from 300 to 400 ℃. It was found that the composition reaction DyPt+DyPt3→2DyPt2 took place at 500 ℃. After annealing at 500 ℃ for 1 h, the compounds DyPt and DyPt3 transformed completely into the DyPt2 compound.
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