Influence of Annealing Time on the Microstructure and Properties of Pb(Zr0.53Ti0.47)O3 Thin Films
来源期刊：Journal Of Wuhan University Of Technology Materials Science Edition2012年第1期
论文作者：黄玲
文章页码：88 - 91
摘 要：The PZT thin films were prepared on （111）- Pt/Ti/SiO2/Si substrates by sol-gel method, and lead acetate [Pb（CH3COO）2], zirconium nitrate [Zr（NO3）4] were used as raw materials. The X-ray diffractometer （XRD） and scanning electron microscopy （SEM） were used to characterize the phase structure and surface morphology of the films annealed at 650 ℃ but with different holding time. Ferroelectric and dielectric properties of the films were measured by the ferroelectric tester and the precision impedance analyzer, respectively. The PZT thin films were constructed with epoxy resin as a composite structure, and the damping properties of the composite were tested by dynamic mechanical analyzer （DMA）. The results show that the films annealed for 90 minutes present a dense and compact crystal arrangement on the surface; moreover, the films also achieve their best electric quality. At the same time, the largest damping loss factor of the composite constructed with the 90 mins-annealed film shows peak value of 0.9, higher than the pure epoxy resin.
黄玲
School of Materials Science and Engineering, Wuhan University of Technology
摘 要：The PZT thin films were prepared on （111）- Pt/Ti/SiO2/Si substrates by sol-gel method, and lead acetate [Pb（CH3COO）2], zirconium nitrate [Zr（NO3）4] were used as raw materials. The X-ray diffractometer （XRD） and scanning electron microscopy （SEM） were used to characterize the phase structure and surface morphology of the films annealed at 650 ℃ but with different holding time. Ferroelectric and dielectric properties of the films were measured by the ferroelectric tester and the precision impedance analyzer, respectively. The PZT thin films were constructed with epoxy resin as a composite structure, and the damping properties of the composite were tested by dynamic mechanical analyzer （DMA）. The results show that the films annealed for 90 minutes present a dense and compact crystal arrangement on the surface; moreover, the films also achieve their best electric quality. At the same time, the largest damping loss factor of the composite constructed with the 90 mins-annealed film shows peak value of 0.9, higher than the pure epoxy resin.
关键词：
