成形工艺对烧结法制备ITO靶材的影响

来源期刊：有色金属2010年第4期

论文作者：王玥 刘家祥 刘宸

文章页码：30 - 33

关键词：粉末冶金； ITO靶材； 素坯； 成形压力； PVA

Key words：powder metallurgy； ITO target； green compact； forming pressure； PVA

摘    要：以平均粒径为30nm的ITO粉体为原料,添加少量聚乙烯醇(PVA)造粒,模压成形获得素坯,在氧气氛、1550℃烧结素坯制备ITO靶材。采用100~600MPa的成形压力,添加0.5%,1.0%,2.5%的PVA制备靶材,研究压力和PVA添加量对靶材制备的影响。结果表明,成形压力在100~500MPa内,素坯及靶材密度随压力升高而增大,500MPa时达到最大值,分别为47.5%和99.16%。600MPa时素坯和靶材密度略微降低。成形压力越高,摩擦导致的压力损失越大,素坯脱模越困难。增大PVA添加量,素坯更易脱模,且坯体内密度分布更均一。添加1.0%的PVA时获得的素坯及靶材密度最高,分别为45.21%和98.45%。得出素坯的较佳制备条件为成型压力400MPa,PVA添加1.0%。

Abstract: The green compact of ITO target is prepared by press forming method with the ITO powders with average particle size about 30nm as raw material and granulating with PVA as adhesive,then the ITO target is produced by green compact sintering at 1550℃ in oxygenated atmosphere.The effects of forming pressure and PVA dosage on ITO targets preparation are investigated with the forming pressure changes from 100MPa to 600MPa,and PVA dosage of 0.5%,1.0% and 2.5%.The experiment results show that the density of ITO green compact and target are increased with the increase of the forming pressure,and the maximum values,47.5% and 99.16%,are achieved at 500MPa.The density of compact and target is slightly declined while the the pressure is continuously increased to 600MPa.The pressure loss caused by friction aggravates is increased with the increase of the pressure,and the demoulding process becomes more difficult.The increase of the additive PVA dosage can promote green compacts demoulding process,and the density distribution in compact is more uniform.The density of ITO green compact and target get their peak values when PVA additive amount is 1.0%,and the peak values are 45.21% and 98.45%,respectively.The optimal parameters for ITO target preparation are 400MPa forming pressure and 1.0% PVA dosage.