(Ti,Al)N/Ti₂AlN涂层的制备

来源期刊：金属学报2010年第6期

论文作者：董瑜亮 闫旭波 赵升升 宫骏 孙超

文章页码：743 - 747

关键词：电弧离子镀； Ti₂AlN涂层； 高温退火； 摩擦系数

Key words：arc ion plating； Ti₂AlN coating； high temperature annealing； friction coefficient

摘    要：利用电弧离子镀技术在不锈钢基体上沉积了Ti-Al-N涂层,研究了沉积工艺参数对沉积态涂层的成分及相组成的影响,以及在不同退火处理条件下各涂层组织的变化.XRD结果表明,通过改变沉积工艺参数可以控制沉积态涂层的成分,使涂层经退火后生成Ti₂AlN相.适当成分的沉积态涂层退火生成Ti₂AlN相所需的最低退火温度为650℃,其它沉积态涂层在700℃或更高温度下退火才能生成Ti₂AlN相;退火过程中可能发生的化学反应为:AlTi₃N+5Al→TiN+2Al₃Ti和AlTi₃N+3Al→Ti₂AlN+Al₃Ti.此外,延长退火时间可使相同工艺下的沉积涂层生成的Ti₂AlN相含量略有增加.利用SEM对涂层进行了分析,测量了涂层的摩擦系数.

Abstract: Ti-Al-N coatings with different Ti,Al and N contents were deposited on 1Cr18Ni9Ti stainless steel substrate by vacuum cathode arc ion plating (AIP) method and the as-deposited coatings were annealed under different conditions.The compositions and phases in the as-deposited coatings were also analyzed and compared.The XRD results showed that the composition of the coatings could be controlled by changing the deposition parameters and distinct Ti₂AlN phase existed in the annealed coatings.The Ti₂AlN phase could not appear unless the annealing temperature reached 650℃.The reactions during the annealing process can be described as AlTi₃N+5Al→TiN+2Al₃Ti and AlTi₃N+3Al→Ti₂AlN+Al₃Ti.The content of Ti₂AlN phase increased slightly by extending the annealing time.The surface morphology and composition of the annealed coating were analyzed by SEM and the friction coefficient of the coating was measured.