氮化硅基体多层膜结构金刚石涂层车削硅铝合金的切削性能

来源期刊:中国有色金属学报(英文版)2013年第7期

论文作者:陈乃超 孙方宏

文章页码:1985 - 1992

关键词:硅铝合金;多层膜结构金刚石涂层;氮化硅;切削性能

Key words:aluminum-silicon alloy; multilayer diamond films; silicon nitride; cutting performance

摘    要:硅铝合金非常难以进行切削加工,金刚石刀具被认为是当前切削该类材料的最好工具。考虑到高附着力和好的表面形貌对化学气相沉积(CVD)金刚石涂层的应用具有重要影响,提出了基于热丝化学气相沉积(HFCVD)方法的多层膜技术,并在氮化硅刀具上沉积出多层膜结构的金刚石涂层,微米金刚石(MCD)/纳米金刚石(NCD)结构。为了与多层膜金刚石涂层进行比较,同时制备出单层MCD和NCD涂层。采用场发射电镜(FE-SEM)和拉曼光谱对沉积的金刚石薄膜进行表征。研究了有沉积金刚石涂层和没有涂层的刀具车削硅铝合金的切削性能。结果表明:MCD/NCD多层金刚石涂层表现出优异的耐磨性能,具有较小的后刀面磨损量,涂层无脱落。

Abstract: Aluminum-silicon (Al-Si) alloy is very difficult to machine and diamond tools are considered by far the best choice for the machining of these materials. Experimental results in the machining of the Al-Si alloy with diamond coated inserts are presented. Considering the fact that high adhesive strength and fine surface morphology play an importance role in the applications of chemical vapor deposition (CVD) diamond films, multilayer technique combining the hot filament CVD (HFCVD) method is proposed, by which multilayer diamond-coating on silicon nitride inserts is obtained, microcrystalline diamond (MCD)/ nanocrystalline diamond (NCD) film. Also, the conventional monolayer NCD and MCD coated inserts are produced for comparison. The as-deposited diamond films are characterized by field emission scanning electron microscopy (FE-SEM) and Raman spectrum. All the CVD diamond coated inserts and uncoated insert endure the aluminum-silicon alloy turning to estimate their cutting performances. Among all the tested inserts, the MCD/NCD coated insert exhibits the perfect behavior as tool wear due to its very low flank wear and no diamond peeling.

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