Influence of Magnetic Annealing on Properties of SmFe Thin Films
来源期刊:JOURNAL OF RARE EARTHS2007年第4期
论文作者:Zhao Dongliang Du Zhaofu Wang Lei
Key words:magnetic annealing; anisotropy; compressive stress; SmFe thin films; rare earths;
Abstract: SmFe thin films were prepared by DC magnetron sputtering at room temperature and 300 ℃. The influence of magnetic annealing temperature on the phase structure and magnetic properties was investigated. Results showed that thermal sputtering followed by a heat treatment process helped to obtain a structure with a relatively large fraction of SmFe2. Residual phases observed were α-Fe, Sm2O3, and unknown phases. During the annealing treatment, the intrinsic compressive stress in SmFe films was relieved and could become tensile at higher annealing temperatures. The degree of in-plane anisotropy weakened, and furthermore, the anisotropy transformed into out-of-plane anisotropy.
Zhao Dongliang1,Du Zhaofu1,Wang Lei1
(1.Functional Materials Research Institute, Central Iron and Steel Research Institute, Beijing 100081, China)
Abstract:SmFe thin films were prepared by DC magnetron sputtering at room temperature and 300 ℃. The influence of magnetic annealing temperature on the phase structure and magnetic properties was investigated. Results showed that thermal sputtering followed by a heat treatment process helped to obtain a structure with a relatively large fraction of SmFe2. Residual phases observed were α-Fe, Sm2O3, and unknown phases. During the annealing treatment, the intrinsic compressive stress in SmFe films was relieved and could become tensile at higher annealing temperatures. The degree of in-plane anisotropy weakened, and furthermore, the anisotropy transformed into out-of-plane anisotropy.
Key words:magnetic annealing; anisotropy; compressive stress; SmFe thin films; rare earths;
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