Preparation of Large Area Double Sided YBCO Thin Films by DC Magneton Sputtering
来源期刊：JOURNAL OF RARE EARTHS2004年增刊第1期
论文作者：Wang Xiaoping Xie Bowei WANG Peiwen Li Tao Gu Hongwei
Key words：large area double sided superconductor thin film; YBCO; magneton sputtering;
Abstract: Tc, Jc and Rs properties of large area double sided YBCO thin films deposited on LaAlO3 substrates by direct current sputtering were reported.Film thickness of the obtained thin films is over 300 nm, Tc ＞ 90 K; Rs can be as low as less than 1.0 mΩ(77 K, 10 GHz).Homogenousity of the properties around the plane was studied.Under the measnous distributions.Influences of substrate temperature and Ar and O2 pressures on properties of the double-sided thin films were discussed.
Wang Xiaoping1，Xie Bowei1，WANG Peiwen1，Li Tao1，Gu Hongwei1
(1.Superconducting Materials Research Center, General Research Institute for Non-Ferrous Metals, Beijing 100088, China)
Abstract:Tc, Jc and Rs properties of large area double sided YBCO thin films deposited on LaAlO3 substrates by direct current sputtering were reported.Film thickness of the obtained thin films is over 300 nm, Tc ＞ 90 K; Rs can be as low as less than 1.0 mΩ(77 K, 10 GHz).Homogenousity of the properties around the plane was studied.Under the measnous distributions.Influences of substrate temperature and Ar and O2 pressures on properties of the double-sided thin films were discussed.
Key words:large area double sided superconductor thin film; YBCO; magneton sputtering;
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