Growth of Niobium Thin Films on Si Substrates by Pulsed Nd:YAG Laser Deposition
来源期刊：JOURNAL OF MATERIALS SCIENCE TECHNOLOG2015年第8期
论文作者：Francisco Gontad Antonella Lorusso Luigi Solombrino loannis Koutselas Nikos Vainos Alessio Perrone
文章页码：784 - 789
摘 要：The growth of Nb thin films on Si（100） substrates by pulsed Nd:YAG laser deposition（PLD） under different laser fluences（4-15 J/cm2） was reported.The influence of laser fluence on ablation rate and deposition rate was discussed.X-ray diffraction（XRD） investigations of the deposited films showed an amorphous structure.The droplet density on the film surface observed by scanning electron microscopy（SEM） analyses was extremely low.It was experimentally proved that the droplets on the film surface originated from liquid phase on the target surface.Profilometric measurements of the deposited Nb films revealed a substantial asymmetry in the film thickness related to the plume deflection effect.The measured electrical resistivity of the Nb film was higher than that of high purity Nb bulk.The present investigations of ablation and deposition process of Nb thin films are related to its potential application in superconducting radio-frequency（SRF） cavities.
Francisco Gontad1，Antonella Lorusso1，Luigi Solombrino1，loannis Koutselas2，Nikos Vainos2，Alessio Perrone1
1. Department of Mathematics and Physics "E.De Giorgi",and National Institute of Nuclear Physics,University of Salento2. Department of Materials Science,University of Patras
摘 要：The growth of Nb thin films on Si（100） substrates by pulsed Nd:YAG laser deposition（PLD） under different laser fluences（4-15 J/cm2） was reported.The influence of laser fluence on ablation rate and deposition rate was discussed.X-ray diffraction（XRD） investigations of the deposited films showed an amorphous structure.The droplet density on the film surface observed by scanning electron microscopy（SEM） analyses was extremely low.It was experimentally proved that the droplets on the film surface originated from liquid phase on the target surface.Profilometric measurements of the deposited Nb films revealed a substantial asymmetry in the film thickness related to the plume deflection effect.The measured electrical resistivity of the Nb film was higher than that of high purity Nb bulk.The present investigations of ablation and deposition process of Nb thin films are related to its potential application in superconducting radio-frequency（SRF） cavities.
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