铟锡氧化物热等静压时分解氧对裂纹形成的作用
来源期刊：中南大学学报(自然科学版)1999年第6期
论文作者：扈百直 张树高 付晓旭 吴义成
文章页码：608 - 610
关键词：氧化铟;氧化锡;裂纹;热等静压;冷等静压
Key words：indium oxide; tin oxide; crack; HIP; CIP
摘 要：用化学共沉淀法制备的铟锡氧化物复合 粉末经冷等静压成形后进行热等静压致密化所得靶材常常会产生裂纹．用电子探针分析了铟锡氧化物热等静压后裂纹处铟、锡和氧的成分分布．结果表明，裂纹处铟 含量极低，锡含量极高，而氧含量低于配比含量，这与In2O3和SnO2在高温下不同的分解行为有关；粉末经高温煅烧预处理后，进行热等静压致密化所获得的靶材的相对密度可达到98%以上，且裂纹大大减少．
Abstract: Indium Tin Oxide (ITO) complex powders synthesized by chemical co precipitation method were densified by HIP technique. The target was to form cracks. The element distribution of In,Sn and O was analyzed at the place of cracks in ITO ceramics by means of HIP (hot isostatic pressing)method. The results show that there is little In but much Sn around the cracks,and the content of oxygen is less than that of ration in the materials, which is due to the differennt decomposition of In2O3 and SnO2 at high temperature. And the forming of cracks can be diminished by pre treatment of powder at high temperature. The relative density of targets is above 98%.
