Crystallization of NiTi shape memory alloy sputtering-deposition film

来源期刊：中国有色金属学报(英文版)2000年第3期

论文作者：邱平善 宋润滨 黄渭馨 李运稀 王桂松 于伟东

文章页码：320 - 323

Key words：sputtering-deposition films; crystallization; shape memory alloys

Abstract: The crystallization of NiTi shape memory alloy sputter-deposition film in the course of sputtering-deposition and that after heat-treated were studied. The relationship between the process factors, such as substrate type, temperature, as well as the crystallization when heat treated after plating was investigated. The results show that a new phase precipitates during heat treatment after sputtering deposition and the degree of crystallization among different layers and the stress in grains are obviously different.