纳米级多孔玻璃CVD改质试验研究

来源期刊：中南大学学报(自然科学版)1997年第3期

论文作者：张术根

文章页码：290 - 293

关键词：多孔玻璃； 改质处理； 化学气相沉积； 气体分离

Key words：porous glass； modifying process； chemical vapor deposition； gas separation

摘    要：采用先进的CVD技术，以 TEOS／O₂作为反应剂，对平均孔径约4nm的硼硅酸盐多孔玻璃进行了改质处理．在反复试验的基础上，探讨了试验条件参数优化和气体渗透分离机理等问题，获得了He／N₂分离系数在室温下约为25，并随温度增高而显著增大的改质效果，提供了环保、化工等领域气体混合物分离的一种途径．

Abstract: The modification of nanoporous glass is a new important technique necessary for permselectivity improvement to meet the application requirement in environment protection and chemical engineering. The author modified the borosilicate porous glass with the mean pore size of about 4 urn via the advanced Chemical Vapor Deposition（CVD） method using TEOS/O₂ reactants system. On the basis of his experiments, the author discussed the optimization of adjustable experimental conditions and the mechanism of gas permeation and separation and achieved a promising modification result. The He/N₂ separation factor reaches as high as 25 at room temperature and increases with the increase of the measuring temperature.