Gas sensing selectivity of oxygen-regulated SnO2 films with different microstructure and texture
来源期刊：JOURNAL OF MATERIALS SCIENCE TECHNOLOG2019年第10期
论文作者：Ruiwu Li Yanwen Zhou Maolin Sun Zhen Gong Yuanyuan Guo Xitao Yin Fayu Wu Wutong Ding
文章页码：2232 - 2237
摘 要：The selectivity of gas sensing materials is increasingly important for their applications. The oxygenregulated SnO2 films with（110） and（101） preferred orientation were obtained through magnetron sputtering, followed by annealing treatment. Their micro-structure, surface morphology and gas response were investigated by advanced structural characterization and property measurement. The results showed that the as-prepared（110）-oriented SnO2 film was oxygen-rich and had more adsorption sites while the as-prepared（101）-oriented SnO2 film was oxygen-poor and more sensitive to de-oxidation.H2 gas sensitivity, response speed, selectivity between H2 and CO of the（110）-orientated SnO2 film was superior to that of the（101）-orientated SnO2 film. After treated at high temperature and high vacuum,the reduction of gas-sensing properties of the annealed（110） SnO2 film was much more than that of the annealed（101） SnO2 film. The lattice oxygen was responsible for the difference in gas-sensing response between（110） and（101）-oriented SnO2 films under oxygen regulation. This work indicated the gassensing selectivity of the different crystal planes in SnO2 film, providing a significant reference for design and extension of the related materials.
Ruiwu Li1，Yanwen Zhou1，Maolin Sun1，Zhen Gong1，Yuanyuan Guo1，Xitao Yin1，Fayu Wu1，Wutong Ding2
1. School of Material Science and Metallurgy, University of Science and Technology Liaoning2. State Key Laboratory of Advanced Processing and Recycling of Nonferrous Metals, Lanzhou University of Technology
摘 要：The selectivity of gas sensing materials is increasingly important for their applications. The oxygenregulated SnO2 films with（110） and（101） preferred orientation were obtained through magnetron sputtering, followed by annealing treatment. Their micro-structure, surface morphology and gas response were investigated by advanced structural characterization and property measurement. The results showed that the as-prepared（110）-oriented SnO2 film was oxygen-rich and had more adsorption sites while the as-prepared（101）-oriented SnO2 film was oxygen-poor and more sensitive to de-oxidation.H2 gas sensitivity, response speed, selectivity between H2 and CO of the（110）-orientated SnO2 film was superior to that of the（101）-orientated SnO2 film. After treated at high temperature and high vacuum,the reduction of gas-sensing properties of the annealed（110） SnO2 film was much more than that of the annealed（101） SnO2 film. The lattice oxygen was responsible for the difference in gas-sensing response between（110） and（101）-oriented SnO2 films under oxygen regulation. This work indicated the gassensing selectivity of the different crystal planes in SnO2 film, providing a significant reference for design and extension of the related materials.
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