Homo-and Hetero-epitaxial GaSb Layers by MOCVD
来源期刊:Rare Metals1992年第2期
论文作者:张宝林 周天明 蒋红 金亿鑫 洪春荣 元金山 缪国庆
文章页码:86 - 91
摘 要:<正> Metalorganic chemical vapor deposition(MOCVD) growth of homo-and hetero-epitaxial GaSb has beeninvestigated,by using trimethylgallium(TMGa)and trimetbylantimony(TMSb)as source materials on n-typeGaSb and semi-insulating GaAs substrates.The influence of Ⅲ/Ⅴ ratio on the growth of GaSb was studiedin detail and it was found that the Ⅲ/Ⅴ ratio range proper for good quality epi-layers is narrow.The carriermobility and concentration of undoped GaSb epi-layers are about 600 cm2/Ⅴ·s and 2~4×1016cm-3atroom temperature,respectively.The low temperature(77K)mobility is about 5 times of the roomtemperature’s one.The low temperature(11K)photoluminescence(PL)spectrum and the temperature depen-dence of PL spectrum were investigated.The red shift of bound exciton with temperature was observed.
张宝林,周天明,蒋红,金亿鑫,洪春荣,元金山,缪国庆
摘 要:<正> Metalorganic chemical vapor deposition(MOCVD) growth of homo-and hetero-epitaxial GaSb has beeninvestigated,by using trimethylgallium(TMGa)and trimetbylantimony(TMSb)as source materials on n-typeGaSb and semi-insulating GaAs substrates.The influence of Ⅲ/Ⅴ ratio on the growth of GaSb was studiedin detail and it was found that the Ⅲ/Ⅴ ratio range proper for good quality epi-layers is narrow.The carriermobility and concentration of undoped GaSb epi-layers are about 600 cm2/Ⅴ·s and 2~4×1016cm-3atroom temperature,respectively.The low temperature(77K)mobility is about 5 times of the roomtemperature’s one.The low temperature(11K)photoluminescence(PL)spectrum and the temperature depen-dence of PL spectrum were investigated.The red shift of bound exciton with temperature was observed.
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