PREPARATION AND CHARACTERIZATION OF POLY-CRYSTALLINE SILICON THIN FILM
来源期刊：Acta Metallurgica Sinica2003年第4期
论文作者：H.Shen Z.Y.Liu Y.F.Hu L.S.Wen
Key words：poly-crystalline silicon thin film; RTCVD (rapid thermal chemical vapor deposition); SSP (silicon sheet from powder);
Abstract: Poly-crystalline silicon thin film has big potential of reducing the cost of solar cells.In this paper the preparation of thin film is introduced, and then the morphology of poly-crystalline thin film is discussed. On the film we developed poly-crystalline silicon thin film solar cells with efficiency up to 6. 05% without anti-reflection coating.
H.Shen1，Z.Y.Liu2，Y.F.Hu2，L.S.Wen2
(1.Guangzhou Institute of Energy Conversion, The Chinese Academy of Sciences, Guangzhou 510070, China;
2.College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China)
Abstract:Poly-crystalline silicon thin film has big potential of reducing the cost of solar cells.In this paper the preparation of thin film is introduced, and then the morphology of poly-crystalline thin film is discussed. On the film we developed poly-crystalline silicon thin film solar cells with efficiency up to 6. 05% without anti-reflection coating.
Key words:poly-crystalline silicon thin film; RTCVD (rapid thermal chemical vapor deposition); SSP (silicon sheet from powder);
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