Improved formaldehyde gas sensing properties of well-controlled Au nanoparticle-decorated In2O3 nanofibers integrated on low power MEMS platform
来源期刊：JOURNAL OF MATERIALS SCIENCE TECHNOLOG2020年第3期
论文作者：Donghyun Kim Joon-Shik Park Hyunjung Kim
文章页码：56 - 63
摘 要：Approaches for the fabrication of a low power-operable formaldehyde（HCHO） gas sensor with high sensitivity and selectivity were performed by the utilization of an effective micro-structured platform with a micro-heater to reach high temperature with low heating power as well as by the integration of indium oxide（In2O3） nanofibers decorated with well-dispersed Au nanoparticles as a sensing material.Homogeneous In2O3 nanofibers with the large specific surface area were prepared by the electrospinning following by calcination process. Au nanoparticles with the well-controlled size as a catalyst were synthesized on the surface of In2O3 nanofibers. The Au-decorated In2O3 nanofibers were reliably integrated as sensing materials on the bridge-type micro-platform including micro-heaters and micro-electrodes.The micro-platform designed to maintain high temperature with low power consumption was fabricated by a microelectromechanical system（MEMS） technique. The micro-platform gas sensor consisting with Au-In2O3 nanofibers were fabricated effectively to detect HCHO gases with high sensitivity and selectivity. The HCHO gas sensing behaviors were schematically studied as a function of the gas concentration,the size of the adsorbed Au nanoparticles, the applied power to raise the temperature of a sensing part and the kind of target gases.
Donghyun Kim1,2，Joon-Shik Park3，Hyunjung Kim2
2. Department of Mineral Resources and Energy Engineering, Chonbuk National University3. Smart Sensor Research Center, Korea Electronic Technology Institute
摘 要：Approaches for the fabrication of a low power-operable formaldehyde（HCHO） gas sensor with high sensitivity and selectivity were performed by the utilization of an effective micro-structured platform with a micro-heater to reach high temperature with low heating power as well as by the integration of indium oxide（In2O3） nanofibers decorated with well-dispersed Au nanoparticles as a sensing material.Homogeneous In2O3 nanofibers with the large specific surface area were prepared by the electrospinning following by calcination process. Au nanoparticles with the well-controlled size as a catalyst were synthesized on the surface of In2O3 nanofibers. The Au-decorated In2O3 nanofibers were reliably integrated as sensing materials on the bridge-type micro-platform including micro-heaters and micro-electrodes.The micro-platform designed to maintain high temperature with low power consumption was fabricated by a microelectromechanical system（MEMS） technique. The micro-platform gas sensor consisting with Au-In2O3 nanofibers were fabricated effectively to detect HCHO gases with high sensitivity and selectivity. The HCHO gas sensing behaviors were schematically studied as a function of the gas concentration,the size of the adsorbed Au nanoparticles, the applied power to raise the temperature of a sensing part and the kind of target gases.
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