Preparation and characterization of barium strontium titanate/silicon nanoporous pillar array composite thin films by a sol-gel method

Shun-hua Xiao 1) and Wei-fen Jiang 2) 1) College of Chemistry and Bioengineering, Key Laboratory of New Processing Technology for Nonferrous Metals and Materials (Ministry of Education), Guilin University of Technology, Guilin 541004, China 2) Department of Mathematics and Information Science, North China Institute of Water Conservancy and Hydroelectric Power, Zhengzhou 450011, China

摘 要：Barium strontium titanate （Ba 0.5 Sr 0.5 TiO 3 , BST）/silicon nanoporous pillar array （Si-NPA） thin films were prepared by a spin-coating/annealing technique based on Si-NPA with micro/nano-structure. Both the isomer conversion of acetylacetone and the network structure combined by enol and Ti-alkoxide facilitate the formation of the BST sol and the subsequent crystallization. Before the perovskite BST begins to form, the intermediate phase （Ba,Sr）Ti 2 O 5 CO 3 is found. The boundary between BST and Si-NPA is of clarity and little interface diffusion, disclosing that Si-NPA is an ideal template substrate in the preparation of multifunctional composite films.

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