粉浆浇注制备大尺寸ITO 靶材工艺

钟景明^1,2,3，岳 坤²，孙本双^1,3，王东新^1,2

(1. 西北稀有金属材料研究院 宁夏特种材料重点实验室，石嘴山 753000；
2. 国家钽铌特种金属材料工程技术研究中心，石嘴山 753000；
3. 中色(宁夏)东方集团有限公司，石嘴山 753000)

摘 要：研究分散剂、pH 值和固相含量对铟锡氧化物(ITO)浆料稳定性、流变性的影响，以及粉浆浇注压力对坯体密度的影响。结果表明：当聚丙烯酸(PAA)质量分数为0.5%、聚乙二醇(PEG) 质量分数为1.5%、pH 值为9、ITO固相含量为70%(质量分数)时，调制的浆料的流变性和稳定性最佳，并在注浆压力为1.5 MPa 的条件下制备出相对密度为68%的高密度粉浆浇注坯体；对该素坯进行常压烧结制备了相对密度高于99.5%的ITO 靶材。对靶材的组织与成分分析发现，粉浆浇注ITO 靶材的结构为氧化锡完全固溶于氧化铟的单一立方In2O3 结构，同时In、Sn和O 元素分布均匀，无元素富集现象，晶粒尺寸均匀，完全满足八代以上镀膜线的应用技术要求。

关键词：ITO 靶材；粉浆浇注；浆料性能； 微观组织

Fabrication process of large size ITO target materials by slip casting

ZHONG Jing-ming^1,2,3,YUE Kun²,SUN Ben-shuang^1,3,WANG Dong-xin^1,2

(1. Ningxia Key Laboratory for Special Metal Materials,
Institute of North West Rare Metal Materials,Shizuishan 753000,China;
2. National Engineering Research Center of Tantalum and Niobium Materials,Shizuishan 753000,China;
3. CNMC Ningxia Orient Group Co.,Ltd.,Shizuishan 753000,China)

Abstract:The effects of additives,pH value and solid content on the stability and rheology of indium tin oxide (ITO) slurry were studied,and the effect of slip casting pressure on the bulk density was investigated. The results show that the slurry with 70% ITO solid content (mass fraction) is very stable and easy to form the ITO green-body with a relative density of 68% under casting pressure of 1.5 MPa when the parameters of forming slurry are fixed at w(PAA)=0.5% (PAA is polyacrylic acid),w(PEG)=1.5% (PEG is polyethylene glycol) and pH=9. The ITO target materials with relative density higher than 99.5% are achieved using the green-body mentioned above by pressureless sintering. The structure of ITO target material is the cubic structure of indium oxide,and the grain size and the elements of In,Sn and O well distribute. The ITO target materials reach the quality for the application in G8 TFT-LCD production line.

Key words:ITO target material; slip casting; slurry property; microstructure