Growth of Free-standing Diamond Films on Graphite Substrates with Ti Interlayers
来源期刊：材料热处理学报2004年第5期
论文作者：LU Fan-xiu CHEN Guang-chao TANG Wei-zhong LI Hui-qing TONG Yu-mei LI Cheng-ming
关键词：free-standing diamond films; Ti interlayer; graphite substrate; CVD;
摘 要：Free-standing diamond films, deposited using Dc Arc Plasma Jet CVD method onto graphite substrates with titanium interlayers, have been investigated. The Ti interlayers were deposited by arc ion plating equipments. The thickness,morphology and composite phase of Ti interlayers were examined by scanning electron microscopy (SEM) and X-ray diffraction (XRD). The titanium carbide (TiC) was detected in both sides of the interlayers, which played an important role with respect to reasonable adhesion with film and diamond nucleation. The semi-translucent diamond films were characterized by SEM and Raman spectrum. The sharp diamond peak with low intensity of amorphous carbon shows that diamond films have very high quality. The overall results suggest that plating Ti interlayer on graphite substrate is an effective way to obtain optical grade free-standing diamond films.
LU Fan-xiu1，CHEN Guang-chao1，TANG Wei-zhong1，LI Hui-qing1，TONG Yu-mei1，LI Cheng-ming1
(1.School of Materials Science and Engineering, University of Science and Technology Beijing, China)
摘要:Free-standing diamond films, deposited using Dc Arc Plasma Jet CVD method onto graphite substrates with titanium interlayers, have been investigated. The Ti interlayers were deposited by arc ion plating equipments. The thickness,morphology and composite phase of Ti interlayers were examined by scanning electron microscopy (SEM) and X-ray diffraction (XRD). The titanium carbide (TiC) was detected in both sides of the interlayers, which played an important role with respect to reasonable adhesion with film and diamond nucleation. The semi-translucent diamond films were characterized by SEM and Raman spectrum. The sharp diamond peak with low intensity of amorphous carbon shows that diamond films have very high quality. The overall results suggest that plating Ti interlayer on graphite substrate is an effective way to obtain optical grade free-standing diamond films.
关键词:free-standing diamond films; Ti interlayer; graphite substrate; CVD;
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